DualBeam Scanning Electron Microscope (Versa 3D，FEI Company) is a commercial imaging machine at micro and nano scale. The Versa 3D is a combination of two systems: 1) A Scanning Electron Microscope (SEM) produces enlarged images of a variety of specimens achieving magnification over 100 000× providing high resolution imaging in a digital format; 2) A Focused Ion Beam (FIB) system is capable of fast and precise milling of the specimen material, revealing the structure under the surface layer, making cross sections, deposition layers, etc. The ion system produces high resolution images as well. The integration of both systems yields a powerful analytical tool for obtaining any data from any sample in three dimensions.