UV Lithography（H94-37，Sichuan Nanguang Vacuum Technology Co., Ltd.）is an important process used in microfabrication to pattern parts on a thin film or the bulk of a substrate. It is mainly used for small and medium-scale integrated device chips, films, optoelectronic device chips, and optical device substrates. This machine is suitable for alignment exposure of silicon, glass, ceramic, gem, easily fragmented substrates such as gallium arsenide, indium phosphide, etc.

Features:

Exposure Area: ≥ 165 mm Ø

Non-uniformity of Light: ≤±3% in φ 150mm

Resolution: 1 μm

Alignment Accuracy: ≤ 1 μm

Exposure Method: Hard / Soft / Micro contact exposure