Thermal evaporation system (JSD 400, JIASHUO Vacuum Technology)  directly heats and vaporizes the source material using the heat produced by a large current through the evaporation source or the source material is heated and evaporated in a tungsten boat indirectly . This method is convenient, but not suitable for high melting point and refractory materials.

Features:

Source materials: Au, Ag, Cr,  Al, etc;

Chamber pressure (during evaporation): 6 x 10 ^ - 4 pa;

At most 4 source materials are put into the equipment for evaporation at one time;

Substrate rotation: support;

Equipped with quartz crystal film thickness monitor.