Stylus profiler (Alpha-Step D-600, KLA Tencor) supports 2D and 3D measurement of step height and roughness, as well as 2D measurement of warpage and stress. Innovative optical lever sensor technology provides high resolution measurement, large vertical range and low contact force measurement function. One advantage of the probe measurement technique is that it is a direct measurement and has nothing to do with material properties. The adjustable contact force and the selection of probes make it possible to accurately measure various structures and materials.

Features:

Vertical height resolution: ≤ 0.1nm

Sample stage movement range: 150mm x 178mm

Probe pressure: 0.03mg – 15mg

Scan length: 55mm